摘要
由平行弹簧和ＰＺＴ构成的纳米位置控制机构，将在纳米加工和测试装置中得到广泛的应用。本文在对该种结构进行了较深入系统探讨的基础上，推出了一种由新型一体型平行弹簧构成的二维纳米微动机构。其轴间干扰小．位置控制精度高，动态特性好。
Abstract This precise nanometer positioning mechanics consists of a monolithic par-allel spring and PZT,It will be widely used in the field of nanometer Process technology andmeasurement system. After studyiiig this mechanics deeply,I develop a precise two-de-meiisional nanometer positioning mechanics. It has small interference among axises,high po-sitioning precision,good denamic property.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1995年第S1期227-231,共5页
Chinese Journal of Scientific Instrument
