高精度直线度基准装置

A High Precision datum Instrument for Strai-ghtness Measurement

本文介绍的以激光波长为测量基准，以单尺反转误差分离为基本测量原理的高精度直线度基准装置，具有结构简单，工作稳定，测量精度高，且测量误差不随被测尺长的加长而增大的特点。该装置的主要技术指标为：分辨力４ｎｍ，示值变动性≤±５０ｎｍ，被测尺长范围１ｍ，测量不确定度为≤±０．１ｕｍ／ｍ。

Abstract A high precision datum instrument for straightness measurement is dis-cussed in the paper.The new instrument takes the laser wave-length as the measuringstantard and the“Single edge reversion”error seperating technique as the basic measuringprinciple.It also has many advantages such as simple structure,high precision and steadyworking state.Besides,measuring error is not accumulated with increasing of the length ofedges.The main technique specifications are as follows,the resolution is 4nm,the variationof indication≤±50nm,measuring range is 1m and measuring uncertainty≤±0.1μm/m.