用激光频差调谐曲线进行纳米位移测量的初步研究

Preliminary Study of Measuring nm Displacement Based on Tuning Curves of Frequency Differences for He一Ne Standing一Wave Lasers.

提出了一种新的纳米测量的原理，用激光频率分裂技术获得两个间隔数十兆兆赫兹的频率，激光两反射镜之一移动时频差将因反常色散而改变，此改变量与反射镜位移大小相对应，初步的实验证明了此原理的可行性，达到１ｎｍ的分辨率和１３０ｎｍ的范围。

Abstract A new theory of measuring nm displacement has been raised.Two Laserfrequencies with tens of MHz spacing have been gotten by using the technology of laser fre-quency split.When one of the two cavity mirrorsis moved,the frequency difference variesdue to the influece of abnormal dispersion,the variation is corresponding to the displacementof the cavity mirror.The resolution and measuring range can be up to 1nm and 130nm respec-tively.