用电化学方法进行纳米级微细加工的初探

Preliminary Research of Nabno-micro Machining by Electrochemical Methods

本文利用电化学中的电解过程是以原子为单位进行阳极溶解的原理，进行了纳米级微细加工的研究。分析了用电化学方法进行原子级加工的可能性和条件，分别用酸、碱、盐等多种电，解液进行了微细加工试验。

Abstract By using of the principle that anode is dissolved in the form of atom dur-ing electrochemical machining,this paper researches the nano一micro machiningby electro-chemical methods.It analyzes the possibilities and conditions of the atomic machining byelectrochemical methods,and studies the effects of the acid,alkali,and salt etc.electrolyteson nano一micro machining by electrochemical methods.