准分子激光原位淀积YBa₂Cu₃O_7－x超导薄膜

in situ Deposition of High T_c Superconducting Thin Film on Silicon Substrate with xcimer Laser

利用ＺｅＣｌ准分子激光在（１００）Ｓｉ基片上原位淀积出ＺｒＯ＿２缓冲层和ＹＢａ＿２Ｃｕ＿３Ｏ＿（７－ｘ）高Ｔ＿ｃ超导薄膜，薄膜的零电阻温度为８２Ｋ．Ｘ射线衍射结果表明该超导薄膜具有很强的ｃ轴取向的正交结构。

High T_c superconducting thin film of YBa_2Cu_3O_(7-x) and Zro_2 buffer layer have been de-posited in situ on(100)silicon substrate with excimer laser.The zero-resistance tempera-ture of the film is T_(c0)=88 K. The X-ray diffraction pattern of the film indicates that the film is of orthorhombic phase structure with strong orientation of c-axis perpendicular to the film surface,Deposition of multi-layer film in the same vacuum chamber with excimer laser has alsobeen achieved.