旋转对称电子光学系统的五级几何像差

The Fifth order Aberrations of Rotationally Symmetrical Electron Optics System

本文通过最小作用原理求解旋转对称电子光学系统中的变分问题，得到了六级变分函数Ｆ＿（＊６），再经欧拉—拉格朗日方程得出六级光程函数ε＿（＊６）。

In this paper sixth order variation function F_(*6) in rotationally symmetri-cal election optics system is firstly derived from Hamilton's principle. Then sixth order op-tical distance function ε_(*6) is obtained by Euler Lagranze equation. Finally,variousfifth order geometric aberrations of this system are given.