JEM—100CX电镜电子束偏转系统故障分析和检修

Analysis and Trouble Shooting for the Beam Deflector Unit in JEM 100CXTEM

电镜故障是多方面的．本文就日本ＪＥＭ—１００ＣＸ电镜电子束偏转系统的一例故障进行分析及排除，供电镜同行参考．

The authors analysed the trouble of the beam deflector in JEM 100CXTEM and summarized the better method for correcting it.This may provide a useful wayfor engineers in maintaining this type of electron microscope.