摘要
采用等离子体化学气相沉积法制备了氧化铁气敏薄膜；用扫描电子显微镜分析了不同衬底及不同衬底温度对氧化铁薄膜表面形貌的影响。
Gas sensing thin film of a-Fe2O3 was made by plasma chemical vapourdeposition.Influence of different substrate and various substrate temperature on surface morpholo-gy of gas-sensing thin film of a-Fe2O3 was studied by scanning electron microscope.
出处
《郑州轻工业学院学报（自然科学版）》
CAS
1994年第S1期144-148,共5页
Journal of Zhengzhou University of Light Industry:Natural Science
基金
国家自然科学基金
关键词
氧化铁
气敏薄膜
扫描电镜
显微分析
iron oxide
gas-sensing thin film
scanning electron microscope
morphol-ogy analysis
