摘要
1 Introduction The recent development of vacuum microelectronics has received much attention. Vacuum microelectronic devices combine the vacuum transport of electrons with the microfabrication in the IC industry, and show a prospect of wide applications. If the devices can operate at moderate voltages, the electric field of about 1×10~7 V/cm is required. Sharp cathodes have to be fabricated so as to intensify the electric field near cathodes under a voltage. It is obvious that the fabrication of sharp cathodes is one of the
基金
Project supported by the Youth Science Foundation of Southeast University.
