金属氧化物半导体场效应晶体管之发展——从起始到ULSI

Evolution of MOSET(Metal-Oxide-Semiconductor Transistor)-from Inception to ULSI

金属氧化物半导体场效应晶体管(MOSFET)是用于ULSI中的重要器件。现在,我们评述从MOSFET的起始,直到在ULSI中应用时期的主要里程碑,并且讨论MOSFET功能的未来趋势。

The metal-oxide-semiconductor field-effect transistor (MOSFET) is the dominant device used in ul- tra-large-scale integrated (ULSI) circuits. We present major milestones in the development of MOSFET from inception to ULSI, and discuss future trends of MOSFET performance.