贴片云纹干涉法测量平面的三维位移

USING MOIRE INTERFEROMETRY OF STICRING FILM TO MEASURE THE TEREE-DIMENSIONAL DISLACEMENT FIELDS ON PLANE

提出贴片云纹干涉法的三维位移方程的一般表达式,利用对称光路和非对称光路,计算了面内位移并分离出离面位移,实现了物平面三维位移场的云纹干涉测量。

This paper represents a general expression of three-dimensional displace- ments epuation of Moiré interferometry of sticking film. Measurement of 3-D dis- placements of plane surface was derived by the author. In-of-plane and out-of -plane displacements in symmetrical and non-symmetrical optical system for Moir6 inter- ferometry can be obtained by using the general expression of 3-D displacements e- quation.