摘要
Microclusters from different structures of silicon and carbon are studied by SIMS under UHV conditions in the mass range below M=200. The sputtered mass spectra of ions Sin+, Cn+ and Cn were obtained from the 10 keV O2+ primary beam bombardment. Comparisons of each spectrum in each group have shown the strong structure effects on the cluster patterns. A brief discussion on the results has been given.
Microclusters from different structures of silicon and carbon are studied by SIMS under UHV conditions in the mass range below M=200. The sputtered mass spectra of ions Sin+, Cn+ and Cn were obtained from the 10 keV O2+ primary beam bombardment. Comparisons of each spectrum in each group have shown the strong structure effects on the cluster patterns. A brief discussion on the results has been given.
