摘要
Resonances in the reaction 19F (α ,p) 22Ne have been used to detect and depth profile 19F in solid targets. Incident alpha particles in the range 2100-2500 keV were used and protons were detected at θ=135° with a large solid angle surface barrier detector covered to stop elastically scattered alpha particles. This technique is a simple, nuclide specific probe and is particularly useful in detecting 19F in the presence of heavy elements such as GaAs where conventional Rutherford backscattering is ineffective. Examples using this technique on epitaxially grown thin films containing LaF3 layers will be presented.
Resonances in the reaction 19F (α ,p) 22Ne have been used to detect and depth profile 19F in solid targets. Incident alpha particles in the range 2100-2500 keV were used and protons were detected at θ=135° with a large solid angle surface barrier detector covered to stop elastically scattered alpha particles. This technique is a simple, nuclide specific probe and is particularly useful in detecting 19F in the presence of heavy elements such as GaAs where conventional Rutherford backscattering is ineffective. Examples using this technique on epitaxially grown thin films containing LaF3 layers will be presented.
