A COMPUTER SIMULATION OF HIGH-DOSE ION IMPLANTATION INTO AMORPHOUS MATERIALS

A COMPUTER SIMULATION OF HIGH-DOSE ION IMPLANTATION INTO AMORPHOUS MATERIALS

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摘要 A computer program MACA was developed for simulating high-dose ion implantation into amorphous solids. The topology of amorphous solids was modelled by adjusting the free flight path distribution between collisions, so that the radial distribution function will characterize the short - range order and long - range disorder of amorphous targets. A simulation example is given. A computer program MACA was developed for simulating high-dose ion implantation into amorphous solids. The topology of amorphous solids was modelled by adjusting the free flight path distribution between collisions, so that the radial distribution function will characterize the short - range order and long - range disorder of amorphous targets. A simulation example is given.

作者袁博虞福春

机构地区 Peking University. Beijing

出处《Nuclear Science and Techniques》 SCIE CAS CSCD 1990年第Z1期82-83,共2页 核技术（英文）

关键词 Simulation of high - DOSE ion IMPLANTATION AMORPHOUS target TOPOLOGY modelling MACA code Simulation of high - dose ion implantation Amorphous target topology modelling MACA code

分类号 TL [核科学技术]

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Nuclear Science and Techniques

1990年第Z1期

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A COMPUTER SIMULATION OF HIGH-DOSE ION IMPLANTATION INTO AMORPHOUS MATERIALS

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