摘要
本工作主要研究了超高真空环境中(5×10^(-10)Torr)多晶Al、Mo、Cu表面在3keV电子束轰击下,表面组份的变化。通过检测俄歇峰高随电子的轰击所发生的变化,对表面组份在电子轰击下所发生的变化进行了观察,并对这些变化的机理进行了探讨。
This work has mainly studied the changes of surface composition of AI, Mo, Cu induced by bombartment of electron beam of 3 keV in the environment of ultra high vacuum(5×10^(-10)Torr). By means of examining the height changes of the Auger peak under the bombardment of electron, we have observed the changes of surface composition and discussed the mechanism of these changes
出处
《真空科学与技术学报》
EI
CAS
CSCD
1990年第1期22-26,共5页
Chinese Journal of Vacuum Science and Technology
