摘要
文中介绍了目前已发表的,四级场质谱计在133×10^(-4)Pa时的结果,测出了四级场质谱计临近上限的线性特性,并对实验结果作出了初步的解释,线性上限由总压强所确定的对稳定离子碰撞损失率所决定,影响线性指数的主要因素是收集极的二次电子发射。
In this paper, the experimental results of quadrupole mass spectrometers at 133×10^(-4) Pa published so far were reviewed. The linearity near the upper limit of quadrupole mass spectrometers were tested, and the preliminary explanation of these properties have been made. The upper limit of the linearity is determined by the loss rate of stable ions which depends on the total pressure, and the linear exponent is mainly determined by the secondary electrons derived from the incidence of the scattered ions and electrons on the collectors.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1990年第3期151-154,共4页
Chinese Journal of Vacuum Science and Technology