氦质谱检漏仪性能诸元关系的研究

THE RELATION STUDY ON THE PERFORMANCE OF THE HELIUM LEAK DETECTOR

本文根据顺流式氦质谱检漏仪和逆流式氦质谱检漏仪真空系统的结构配置特点,分别推导出这两类检漏灵敏度、最高入口工作压强、抽气时间、最小可检漏率、最大可检漏率、响应时间和清除时间等特性的普适性计算公式。这些公式能够解释有关的实验结果,有助于分子泵逆流检漏仪的研制开发。

In this paper, the general relations of the leak detection sensitivity, the maximum allowable inlet pressure, the pumping time, the minimum detectable leak rate, the maximum detectable leak rate, the response time, and the cleaning time of the main-flow helium leak detector and the counter-flow helium leak detector are deduced respectively based on the construction properties of the vacuum system in each type of leak detector. One can explain all the relevant experimental results up to now with these formulas. They are helpful to developing and studying the domestic counter-flow leak detector with tnrbomolecular pump.