用离子团束(ICB)技术制备有机薄膜

PREPARATIONS OF ORGANIC THIN FILMS BY IONIZED

为了将有机薄膜用于半导体或集成器件中,本文研究了用离子团束方法制备聚乙饰薄膜。用透射电子显微镜(TEM)和扫描隧道显微镜(STM)分析了所制备的样品。它们具有相当好的结晶特性,其菱形晶片边长尺寸为2—20μm,通常是(001)面平行于基底表面。用离子团束技术制备的聚乙烯薄膜表面是比较平整、均匀的,杂质和缺陷较少。

Polyethylene thin films, which are prepared with ionized cluster beam (ICB) technique, have been studied in order to apply organic thin fihns in simeconductor and integrated devices. These samples have been analysed with transmission electron microscope (TEM) and scanning tunneling microscope (STM). These polyethylene thin films possess considerably good crystal structures. The sizes of the rhornbic sides of the crystal lamellae are about 2-20μm. Usually, the (001) plane of the polyethylene thin film is parallel to the substrate surface The thin polyethylene films, which are prepared, with ICB technique, possess flat surface, less impurities and less defects.