准分子激光的光束特性研究

Study on beam characteristics of excimer lasers

本文采用二维CCD列阵检测准分子激光的光束特性。研究了长时间运转下,光束的均匀性和光束重心的漂移。并讨论了它们与放电稳定性之间的关系。

The beam characteristics of exeimer lasers are detected by using a two dimensional CCD array. The beam uniformity and the drift of the gravity center of the beam pattern are investigated for long term operation of exeimer lasers. The relationship between the beam characteristics and discharge stability are discussed.