X光预电离KrF准分子激光参量的研究

Parametric research on X-ray preionized KrF excimer lasers

在紫外预电离准分子激光器中,KrF激光的脉冲能量一般大于XeCl激光脉冲能量。在X光预电离条件下,呈现相反的趋势。本文通过激光参量研究及动力学过程分析,解释了上述现象。

In the UV preionized excimer laser, the output energy of KrF laser is generally greater than that of the XeCl laser. Whereas the output energy of KrF laser is smaller than that of the XeCl laser with x-ray preionization. This results are explained by parametric research and kinetic analysis of the laser.