扫描式光热显微镜测量光学薄膜吸收率的分布

Measurement of absorption distribution on optical thin film by scanning photothermal microscopy

基于光热偏转光谱术建立起来的扫描式光热显微镜,测量了激光损伤薄膜的吸收率分布。其检测灵敏度为2.5×10^(-6)测量准确度为1S％。

A scanning photothermal microscopy based on photothermal deflection spectroscopy is used to measure the absorption distribution of laser damaged films. Its detecting sensitivity and detecting accuracy is 2.5×10-6 and 18% respectively.