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常压MOCVD法制备ZnTe单晶膜

GROWTH OF ZnTe SINGLE CRYSTAL FILMS BY ATMOSPHERIC PRESSURE METAL ORGANIC CHEMICAL VAPOR DEPOSITION
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摘要 本文叙述了常压MOCVD法制备ZnTe单晶膜的方法.通过x-ray衍射和光政发光的测量,表明已生长出高质量的ZnTe单晶膜.为生长ZnSxTel-x固溶体,获得从绿色到紫色的发光材料准备了条件. ZnTe Single crystal films have been grown by atmospheric pressuremetal organic chemical vapor deposition (MOCVD) for the first time. Themeasurements of x--ray diffraction and photoluminescence emission spectra show thatthe ZnTe single crystals films have good qualities. We made the good condition forgrowing the ZnSxTel-x mixed crystals in order to obtain the green to violetluminescence materials.
出处 《南昌大学学报(工科版)》 CAS 1990年第3期60-62,88,共4页 Journal of Nanchang University(Engineering & Technology)
关键词 金属有机化学汽相沉淀 ZnTe单晶膜 光致发光 X射线衍射 MOCVD ZnTe single crystal films photoluminescence x-ray diffraction
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