光学元件亚表层损伤检测和规律研究

Optical Subsurface Damage Detection and Its Anaiysis

为了分析光学元件的加工工艺与亚表层损伤的关系,验证亚表层损伤/表面粗糙度比例预测模型的正确性,探索一种能够快速检测亚表层损伤的方法.文中基于激光散射和共聚焦显微成像理论,分析了共聚焦显微系统测量亚表层损伤的可行性;对三种不同工艺加工的光学表面,利用OPTELICS S130五波长共聚焦显微镜获得光学表面亚表层损伤的三维立体图和纵向数据图,在TalySurf CCI上测量了光学表面的粗糙度,分析了加工过程中磨粒直径变化规律对表面粗糙度和亚表层损伤深度的影响,验证了亚表层损伤深度和表面粗糙度之间呈单调递增了的非线性关系.研究结果表明,共聚焦显微成像技术可以实现亚表层的非破坏性定量检测.

A method of fast testing subsurface damage（SSD） is explored to analyze the relationship between the processing technology and SSD of optical elements and to verify the correctness of the proportional prediction model of SSD/surface roughness（SR）.The feasibility of testing SSD with the confocal microscopy system is analyzed based on the imaging system of the confocal microscope.Based on the 3D map and longitudinal data of subsurface obtained by the five-wavelength confocal microscope,for the optical surfaces processed with three different techniques,the SR is measured by TalySurf CCI.The effects of different abrasive sizes on SR and SSD are analyzed.The monotone increasing nonlinear relationship between the SSD depth and SR is verified.The results indicate that the non-destructive quantitative detection measurement of SSD can be realized by confocal imaging technique.