微机电陀螺速率传感器传输特性研究

Transmission Characteristics of Microelectro-mechanical Gyro Rate Sensor

随着现代科技的发展,传感器技术已经成为一门现代科技的前沿技术。在国防和军事领域,随着微电子技术、通信技术和计算机技术,特别是MEMS技术的迅速发展,军用传感器技术水平以惊人的速度在不断提升,它在航空、航天、火炮炮控系统、军用智能机器人等领域被广泛的应用。由于传感器会产生时漂,某些参数可能发生变化,从而影响依据其初始标定数据建立的输入-输出特性,最终会造成测量误差。本文引入微机电陀螺速率传感器技术,在使用该传感器之前,对该速率陀螺传感器进行传输特性研究。

Along with the development of modern science and technology,the sensor technology has become the cutting edge technology of modern science and technology.In the national defense and military field,with the development of microelectronics technology,the communication technology and computer technology,particularly the rapid development of MEMS technology,military sensor technology level rose at an alarming rate.It is widely used in aviation,spaceflight,artillery gun control system,military intelligence robot field.Because sensors will arise time varying drifts,some parameters may be changed,thus influence on the input/output characteristics set by the initial calibration data,and eventually result in measurement errors.This paper introduces a microelectro-mechanical gyro rate sensor technology and studies transmission characteristic of rate gyro sensor.