Fe掺杂对TiO_2薄膜材料晶体结构转变的影响

Influence of Fe-doping on Crystalline Structure Transition of TiO_2 Films Materials

应用直流磁控溅射方法并结合原位退火工艺,在普通玻璃基片上制备了不同Fe掺杂的TiO2薄膜,沉积过程中保持基底温度300℃.实验结果表明,退火氛围及Fe的掺杂量对TiO2薄膜的结晶状态、微结构及形貌都有很大影响.真空中500℃下退火0.5 h的Fe-TiO2薄膜样品表现为非晶态结构,而空气中500℃下退火0.5 h的该样品则结晶状态良好;随着Fe掺杂量的增加,TiO2薄膜样品逐渐由锐钛矿相向金红石相转变.

Fe-doped TiO2 films have been fabricated onto glass substrates at 300 ℃ by direct-current magnetron sputtering and in-situ annealing.The present study shows that the crystallization,the microstructure,and the morphology of TiO2 films are greatly influenced by annealing atmosphere and Fe composition.The samples of Fe-TiO2 film annealed at 500 ℃ for 0.5 h in vacuum show amorphous structure.However,the sample ones annealed at 500 ℃ for 0.5 h in air show better crystallization and Fe doping improves the phase transformation of TiO2 films from anatase to rutile.