磁控溅射工艺参数对钛金属镀膜涤纶织物耐磨性的研究

Preparation of titanium coated polyester fabrics and study on wear resistance

为了研究磁控溅射镀膜工艺参数对镀膜织物耐磨性的影响,以涤纶织物为基材,采用磁控溅射工艺,在不同镀膜时间、不同镀膜压强、不同镀膜功率下对涤纶织物进行镀钛,然后对镀膜织物进行摩擦处理,通过显微镜观察,分析镀膜工艺参数对耐磨性的影响。实验研究表明,镀膜织物的耐磨性与摩擦次数的有关,摩擦次数越多,镀膜织物耐磨性越强。随着镀膜时间的增加,镀膜织物的耐磨性越强;随着镀膜压强的增加,镀膜织物的耐磨性在0.8 Pa时,达到最大。随着镀膜功率的增加,镀膜织物的耐磨性逐渐增强。

To investigate the effect of magnetron sputtering process parameters on the wear resistance of titanium coated fabrics,the polyester fabric was taken as the substrate,titanium film was coated on the fabric at different coating time,pressure,power.Then the coating fabric was rubbed,coating＇s attrition rate through the microscope was observed,and the effect of coating process parameters on the wear resistance was analyzed.The experimental study indicated that the attrition rate of coating is related with friction times,the more the number of friction,the greater the wear resistance.With increase of coating time,the coating fabric＇s resistance became stronger;when coating pressure is 0.8 Pa,the resistance reaches the apex of the grey value.Along with the deposition power increases,the wear resistance of coated fabrics strengthens.