Y_2O_3薄膜/锡掺杂玻璃光波导气敏元件及其气敏性

Yttrium Oxide Thin Film/Tin-Diffused Optical Waveguide Sensor and Gas-Sensing Properties

采用溶胶-凝胶法将氧化钇(Y2O3)敏感膜固定在锡掺杂玻璃光波导表面,研制出了Y2O3薄膜/锡掺杂玻璃光波导气敏元件,并对挥发性有机气体进行了检测。通过XRD测试对敏感薄膜的结构及晶粒尺寸进行了表征。实验结果表明,在室温下Y2O3薄膜/锡掺杂玻璃光波导气敏元件对二甲苯、氯苯气体有较好的选择性响应,其响应浓度范围为1×10-3～1×10-5(V/V)。Y2O3薄膜/锡掺杂玻璃光波导气敏元件具有灵敏度高、成本低、响应速度快、制作工艺简单和可逆性好等优点。

The yttrium oxide thin films were fabricated by coating the thin film of yttrium oxide on the surface of tin-diffused glass optical waveguide using sol-gel method. The optical waveguide sensor was used to detect volatile organic compounds （VOCs） gases. The structure and grain size of the sensing film was characterized by X-ray diffraction （XRD）. At room temperature the yttrium oxide thin film/tin diffused OWG had strong response to the xylene and chlorobenzene gases. Its detection range was 10-3 - 10-5 （V/V）. The sensor had several advantages of high sensitivity, low cost, fast response, easy fabrication, and good reversibility.