期刊文献+

气态二聚体裂解温度对Parylene C膜力学和透气性能的影响

Influence of Gas Dimers Pyrolysis Temperature on Tensile Strength and Gas Transmission of Parylene C Film
下载PDF
导出
摘要 通过控制气态环状二聚体原料的裂解温度,在不同裂解温度下合成Parylene C膜,分析了裂解温度对膜的微观组织、拉伸性能和透气性能的影响。研究结果表明,当温度低于600℃时,原料裂解不充分,膜中存在大量未裂解原料的球状聚集体,导致膜的拉伸强度降低,气体透过率较高;当裂解温度达到720℃,气态原料存在部分过度裂解,裂解温度在630℃~690℃时,原料的裂解较充分,而且过裂解程度较小,制备的膜综合性能优异。 In this study,Parylene C films were prepared by polymerization of gas monomers pyrolysised at different temperature.Influence of the pyrolysis temperature on micrographs,tensile strength and gas transmission property of Parylene C film was discussed.The results show that tensile strength decreases and gas transmission increases due to some congeries of dimmers pyrolysised inadequately embedded in films when pyrolysis temperature is less than 600 ℃.Some dimers are pyrolysised overly at 720 ℃.Performance of the films which prepared by gas dimers pyrolysised at 630 ℃~690 ℃ is excellent.
出处 《高分子材料科学与工程》 EI CAS CSCD 北大核心 2011年第11期77-80,共4页 Polymer Materials Science & Engineering
关键词 PARYLENE C 透气性能 裂解温度 化学气相沉积 Parylene C gas transmission pyrolysis temperature chemical vapour deposition
  • 相关文献

参考文献3

二级参考文献16

  • 1张颖,王志,王世昌.高分子膜结构对气体传递的影响[J].高分子材料科学与工程,2004,20(4):24-27. 被引量:13
  • 2胡国贞,陈梦雪,肖湘竹.薄膜涂层材料——聚对二甲苯[J].成都教育学院学报,2005,19(1):43-44. 被引量:13
  • 3吴礼群.Parylene敷形涂层[J].电子机械工程,2004,20(6):51-53. 被引量:15
  • 4曾文茹,周允基,霍然,姚斌,李元洲.非等温动力学积分-微分法研究聚苯乙烯热解反应机理及动力学参数[J].高分子材料科学与工程,2006,22(5):162-165. 被引量:10
  • 5吉祥波,鲜晓斌,唐贤臣,赵宗峰,陈艳平.Parylene C膜非等温结晶行为及动力学研究[J].现代塑料加工应用,2007,19(3):42-44. 被引量:4
  • 6Beach W F, Lee C, Bassett D R, Austin T M. Xylylene polymers. in: encyclopedia of polymer science and engineering[M]. 2nd Edition, New York: John Wiley & Sons, 1989: 990-1025.
  • 7Scan Pursel, Mark W Horn, Melik C Demirel, et al. Growth of sculptured polymer submicronwire assemblies by vapor deposition[J]. Polymer, 2005, 46: 9544-9548.
  • 8Yang Lung-Jieh, Lin Wei-zhi, Yao Tze-Jung, Tai Yu-Chong. Photo-patternable gelatin as protection layers in low-temperature surface micromachinings[J]. Sensors and Actuators (A), 2003; 103: 284-290.
  • 9Monk D J,Toh H S, Wertz J. Oxidative degradation of parylene C ( poly (monochloro-para-xylylene)) thin films on bulkmicromachined piezoresistive silicon pressure sensors[J]. Sensors and Materials, 1997, 9(5): 307-319.
  • 10Huang HongLiang , Xu Yongan , Yee Hong. Effects of film thickness on moisture sorption, glass transition temperature and morphology of poly(chloro-p-xylylene) film[J]. Polymer , 2005, 46 : 5949-5955.

共引文献11

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部