LGS晶体优化切型声表面波特性计算

Calculation of SAW properties of LGS crystal with optimal cut-types

针对La3Ga5SiO14(LGS)压电晶体的特性,利用2种边界条件下克里斯托夫方程,计算了LGS晶体典型欧拉角为切型的相速度、能流角、各项异性因子,机电耦合系数和频率温度系数等声表面波(SAW)性质。计算结果表明,对欧拉角为(90.0°,20.0°,122.2°)和(90.0°,17.5°,121.9°)等切型,LGS晶体同时具有低能流角,低温度频率系数和适中的机电耦合系数,可用于高温环境下声表面波器件制作。

In terms of the featares of La3Ga5SiO14（LGS） cryztal,by using Christopher eqvation,under two bowndary conditions,the surface acoustic wave（SAW） properties including propagation velocity（V）,power flow angle（φ）,anisotropic factor（δ）,electromechanical coupling factor（k2） and temperature coefficient of frequency（CTF） of LGS are calculated in an optimal region defined by the typical Euler angle.The calculated results show that the orientation of（90.0°,20.0°,122.2°） and（90.0°,17.5°,121.9°） have zero φ,low CTF and moderate k2 simultaneously,which can be used for the designing of SAW devices at high temperature.