摘要
运用Ansys模拟软件对不同厚度的微悬臂梁在同一电压下(未达到吸合电压)进行静电力分析,得到悬臂梁固定端的应力大小,同时得到此应力与厚度的关系。再根据力学相关解析式对固定端进行力学分析,通过比较两种方法得到的结论,发现结论是相反的,因此得出弹性模量E是决定微观材料性能的重要因素,以及静电力作用下的微悬臂梁存在机电耦合作用,单纯的力学解析式是没法精确计算得出的。
The Ansys simulate software is utilized to analyse the electrostatic force of the different thickness micro-cantilever beam at the same voltage （not get to the pull-in voltage） in the paper, it obtained the stress of fixed end of micro-beam and the relation be- tween stress and thickness. And then on the basis of analyzing expression with mechanics, and comparing with the two conclusion, it is easy to find that they arc different, so the elastic modulus E is the important factor to the microcosmic material function, and it is existed the electrostatic-mechanical coupled effect in the micro-beam with the electrostatic force, it is unable to calculate the result with the simple mechanics analysis formula.
出处
《机电工程技术》
2011年第11期96-99,共4页
Mechanical & Electrical Engineering Technology
基金
福建省自然科学基金项目(编号2008J0141
2009J01331)
关键词
微悬臂梁
ANSYS
静电力
应力
解析公式
micro-cantilever beam
Ansys
electrostatic force
stress
analysis formula
