摘要
本文利用化学气相沉积(CVD)法,以乙烯为碳源气体,二茂铁为催化剂,在二氧化硅上制备出一系列碳纳米管,并通过拉曼光谱和扫描电子显微镜(SEM)对其形貌、结构和组分进行表征,分析反应温度对碳纳米管的影响。研究发现:当反应温度为860℃时,有均匀的碳纳米管薄膜生成,其管径和长度分别达到104 nm和95μm,同时结构缺陷少,非碳管杂质较少,纯度较高。
A series of carbon nanotubes were synthesized on SiO2 substrate by chemical vapor deposition method. Ethylene was used as the carbon source, while ferrocene was used as the catalyst. The scanning electron microscope and Raman spectrum were employed to investigate the effects of reaction temperature on the structure and component of the carbon nanotubes. The resuhs show that, when the reaction temperature is 860℃, the synthesis of well-distributed carbon nanotubes with less impurity was achieved. The carbon nanotubes possessed the longest length of 95um and diameter of 104nm.
出处
《真空》
CAS
北大核心
2011年第6期15-17,共3页
Vacuum
基金
国家自然科学基金(11075116)
国家重大科学研究计划(2012CB933604)
国家自然科学基金"石墨烯的离子注入功能化修饰对其细胞和血液相容性的调控"(2012)
东南大学生物电子学国家重点实验室开放研究基金(2010-2012)
射线束技术与材料改性教育部重点实验室开放基金(201014)联合资助
关键词
化学气相沉积
碳纳米管
反应温度
chemical vapor deposition
carbon nanotube
reaction temperature