便携式泰曼格林型干涉仪装调方法研究

Alignment technology of portable Tyman-Green interferometer

为满足光学系统对高精度检测的要求,依据一种新型便携式干涉仪的设计方案,研究了装调方法。该型干涉仪基于改进的泰曼-格林光路结构,其设计测试精度达到λ/10(P-V,λ=630nm),具有参考镜离轴、体积小巧、便携、精度较高、成本低及便于批量装备等新特点。针对该新型干涉仪的结构特点,研究了以两个互相垂直的光轴为基准对整体结构进行装调的新方法,并用装调完善的干涉仪进行了实测试验和比对试验。试验结果表明,该新型干涉仪器对已知面型精度为λ/10(P-V,λ=630nm)的标准球面镜进行检测,其精度可达到0.09λ;在相同的测试条件下进行比对实验时,该新型干涉仪对普通标准球面镜的检测结果为0.053λ(RMS,λ=630nm),ZYGO干涉仪的检测结果为0.051λ(RMS,λ=632.8nm),两者测量能力较为接近。采用新装调方法进行装调的该新型便携式干涉仪的实际检测精度达到了设计要求,新装调方法可以满足该新型干涉仪的指标要求。

In order to meet the requirements for high-precision test of optical components and systems,the paper researched the assorted alignment method based on the design of a new type of portable interferometer.This new type of interferometer with a theoretical precision of λ/10（PV,λ=630 nm） is developed from the improved Tyman-Green interference optical structure,it has several advantages such as off-axis reference mirror,small size,low cost and high accuracy.According to the structure of the portable Tyman-Green interferometer,the alignment method for the overall system with two vertical optical axes as the reference was studied.The interferometer was aligned by using this method.Then the measurement experiment and comparison experiment were carried out.The experiment which focuses on testing the standard spherical mirror with the peak value（PV） of λ/10 shows that the interferometer has a measurement precision of 0.09 λ（PV,λ=630 nm）;and the comparison experiment shows that when measuring a regular standard spherical mirror in the same testing environment,the precision of the interferometer is 0.053 λ（root mean square,λ=630 nm）,while the one of Zygo interferometer is 0.051 λ（RMS,λ=632.8 nm）.The results indicate that the measurement accuracy of potable Tyman-Green interferometer aligned by the new alignment method is almost equal to the one of Zygo interferometer and closed to the theoretical limit,the new alignment method satisfies the demands of the portable Tyman-Green interferometer.