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用于均匀照明的单片微透镜阵列面形设计 被引量:3

Design of Monolithic Microlens Array for Homogeneous Illumination
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摘要 针对半导体光源不易均匀散射到一定的角度范围或均匀照射到确定平面上的问题,本文利用非成像光学方法设计了一种基于微透镜阵列的均匀散射透镜。该散射透镜由相同面元的微透镜周期性密排而成,微透镜单元为单曲面,根据不同应用,曲面面形可设计成不同的非球面形式。介绍了凸形、前曲面单片微透镜阵列的设计方法,并结合一些应用举例显示了该设计方法的可行性。最后讨论了凹凸面形、前后曲面微透镜阵列各自的应用场合及优缺点。 To satisfy the semiconductor illuminant scattering into the certain angle range or even illuminate to determining flat uniformly, a homogeneous scattering lens based on microlens array was designed by non-imaging optics method. It constituted by microlens unit with same curved surface periodic densely, and the curved surface could be changed into different a spherical form according to the different application. The design of convex monolithic microlens array for large-range uniform illumination was discussed detailed starting from the basic geometrical structure, and some examples of application were presented to show the feasibility of this method. Then, the advantages and disadvantages of convex and concave microlens with front or after curved surface was compared and discussed.
出处 《半导体技术》 CAS CSCD 北大核心 2011年第12期915-919,共5页 Semiconductor Technology
关键词 微透镜阵列 均匀亮度 均匀照度 半导体光源 光学设计 microlens array uniform brightness uniform illumination semiconductor optical source optical design
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