157nm激光微加工制作的微光纤压力传感器

Fiber-Optic Tip Pressure Sensor Fabricated by 157 nm Laser

为了提高微光纤压力传感器的制作效率,采用157nm激光加工的自封闭式法布里-珀罗腔,形成在线式全光纤压力传感器,包括微腔和一截短的单模光纤。跟踪压力传感器相位的变化可以获得压力大小。在0～60MPa的测量范围内,灵敏度达到0.01rad/MPa,长期稳定性达到±0.04MPa。所做的10个传感器样品,在60 MPa的测量范围内,灵敏度的冗余度达到±5%,可以规模化制造。这种传感器有望在航空航天、汽车工业和井下监测等领域发挥作用。

In order to improve the fabrication efficiency of micro fiber pressure sensors, an optical fiber sensor based on Fabry-Perot （F-P） interferometer fabricated by using 157 nm laser micromachining is proposed and demonstrated. The sensor head consists of a short air F-P cavity near the tip of a single-mode fiber and the fiber tip. Tracking the phase signal, the variation of pressure can be obtained. In the pressure measurement range of 0 - 60 MPa, the sensitivity and long-term stability of the sensor are 0.01 rad/MPa and ±0.04 MPa, respectively. For ten sensor samples tested, the tolerance of sensitivity of the sensors for 60 MPa measurement range is ± 5 %. This sensor has great potential to realize mass-production of good reproducibility and the application prospect in industry measurement is wonderful.