红外光谱仪多级微反射镜模拟分析及制作研究

Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer

随着环境科学、气象监测和空间探测等前沿基础研究领域的发展,可便携、实时监测的光谱仪器的需求变得更加迫切。以多级微反射镜为关键器件的空间调制微型傅里叶变换红外光谱仪体积小、无可动部件,可实现实时检测与在线监测。模拟分析了多级微反射镜的台阶高度及表面粗糙度对复原光谱的影响,得到多级微反射镜的台阶高度允许的最大误差为±0.18μm,反射面表面粗糙度的最大容限为150nm和200nm。根据实验研究及对比分析,选用多次光刻-电镀方法制作了多级微反射镜。测试表明,以此方法制作的多级微反射镜表面粗糙度均方根(RMS)值为90.23nm,台阶高度误差值为±0.1μm,基本满足系统的设计要求。

With the modernized development of environmental science, weather observation and space detection and so on, it is an urgent requirement to carry out the research of portable and real-time supervised Fourier transform spectroscope in the leading basic research. A new micro-spaced modulated Fourier transform infrared spectroscope is proposed, without moving parts in this configuration. Thereinto, two multi-micromirrors are the key components in the interferometric system. The effect on the recovery spectra of the height of steps and the roughness of reflective surfaces in multi-micromirrors is simulated, and the height error of steps that can be tolerated by the system is ±0.18 μm, and the biggest roughness is settled at 150 and 200 nm. The multi-micromirror is fabricated by lithography-electroplating. The test result of the roughness of the reflectives surfaces of the multi-micro mirror （RMS） is 90.23 nm, and the height error of steps is ±0.1 μm, which meet the requirement of the design.