摘要
谐振式硅微机械加速度计作为一种新型的对加速度进行测量的传感器,是通过检测加速度施加前后谐振敏感元件谐振频率变化实现对加速度检测的。该传感器具有频率信号输出、稳定性好、灵敏度高、精度高等优点,己成为微传感器的重要发展方向之一。汇总了该传感器的国内外相关研究现状,并对加工工艺进行了总结,讨论了谐振式硅微加速度计设计中的关键技术因素,并给出了未来的发展方向。
The silicon resonant micro-electro-mechanical system（MEMS） accelerometer is a new kind of sensor which is used to measure the acceleration by detecting the change of resonant frequency of the sensitive element. This kind of sensor has many advantages such as frequency signal output, high stability and sensitivity. The fabrication process is also introduced in detail. General research prospect is summarized.
出处
《传感器与微系统》
CSCD
北大核心
2011年第12期4-7,共4页
Transducer and Microsystem Technologies
关键词
谐振式微机械加速度计
谐振敏感元件
谐振频率
灵敏度
resonant MEMS accelerometer
resonant sensitive element
resonant frequency
sensitivity
