摘要
基于相位法的位置敏感探测器(PSD)检测技术较之幅值法具有处理电路简单、检测精度高、抗干扰能力强、环境适应性好等优点。利用二维双面分流型PSD和LabVIEW虚拟仪器平台,实现了基于相位法的PSD微位移测量系统的设计。实验表明:PSD输出信号的相位差和光斑位置具有良好的线性关系,非线性误差小于0.1%。
PSD detection technique based on phase method has advantages of simple processing circuit, high detecting precision, strong anti-interference ability and good environmental adaptability, compared with amplitude method. A micro-displacement measurement system based on LabVIEW and 2D duo-lateral PSD is designed. Experimental results reveal that the phase difference of the PSD output signal and the light spot position have good linear relation, and the nonlinear error is less than 0.1%.
出处
《传感器与微系统》
CSCD
北大核心
2011年第12期116-118,共3页
Transducer and Microsystem Technologies
基金
重庆市自然科学基金资助项目(CSTC
2009BB3363)
关键词
位置敏感探测器
相位法
LABVIEW
虚拟仪器
微位移测量
position sensitive detector （ PSD ）
phase method
LabVIEW
virtual instrument
microdisplacement measurement
