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MOS Capacitance-Voltage Characteristics Ⅱ.Sensitivity of Electronic Trapping at Dopant Impurity from Parameter Variations 被引量:1

MOS Capacitance-Voltage Characteristics Ⅱ.Sensitivity of Electronic Trapping at Dopant Impurity from Parameter Variations
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摘要 Low-frequency and high-frequency Capacitance-Voltage (C-V) curves of Metal-Oxide- Semiconductor Capacitors (MOSC), including electron and hole trapping at the dopant donor and acceptor impurities, are presented to illustrate giant trapping capacitances, from 〉 0.01Cox to 〉 10Cox. Five device and materials parameters are varied for fundamental trapping parameter characterization, and electrical and optical signal processing applications. Parameters include spatially constant concentration of the dopant-donor-impurity electron trap, NDD, the ground state electron trapping energy level depth measured from the conduction band edge, Ec - ED, the degeneracy of the trapped electron at the ground state, gD, the device temperature, T, and the gate oxide thickness, xox. Low-frequency and high-frequency Capacitance-Voltage (C-V) curves of Metal-Oxide- Semiconductor Capacitors (MOSC), including electron and hole trapping at the dopant donor and acceptor impurities, are presented to illustrate giant trapping capacitances, from 〉 0.01Cox to 〉 10Cox. Five device and materials parameters are varied for fundamental trapping parameter characterization, and electrical and optical signal processing applications. Parameters include spatially constant concentration of the dopant-donor-impurity electron trap, NDD, the ground state electron trapping energy level depth measured from the conduction band edge, Ec - ED, the degeneracy of the trapped electron at the ground state, gD, the device temperature, T, and the gate oxide thickness, xox.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第12期1-11,共11页 半导体学报(英文版)
基金 supported by Xiamen University,China the CTSAH Associates(CTSA) founded by the late Linda Su-Nan Chang Sah
关键词 trapping capacitance donor dopant impurity electron trap MOS trapping capacitance donor dopant impurity electron trap MOS
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参考文献7

  • 1Chih-Tang Sah, Fundamentals of Solid-State Electronics--Study Guide, 423pp. World Scientific Publishing Company, Singapore. 1993.
  • 2Peter J. Mohr, Barry N. Taylor and David B. Newell, "CODATA Recommended Values of the Fundamental Physical Constants: 2006," Reviews of Modern Physics, 80(2), 633-730, April-June, 2008. See also Handbook of Chemistry and Physics, 92th Edition, 2011-2012, CRC Press.
  • 3Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics from Electron-Trapping at Dopant Donor Impurity," Journal of Semiconductors, 32(4), 041001, 1-10, April 2011. This will be referred to as paper I in this series of articles on trapping capacitances in this and the later issues of this journal.
  • 4Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics III. Trapping Capacitance from 2-Charge-State Impurities," This issue, 32(12), following paper.
  • 5Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics IV. Trapping Capacitance from 3-Charge-State Impurties," Journal of Semiconductors, 33(1), in press.
  • 6Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics V. Methods to Enhance Trapping Capacitance," Journal of Semiconductors, 33(1), in press.
  • 7Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics VI. Applications of Trapping Capacitance," Journal of Semiconductors, in press.

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