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MOS Capacitance-Voltage Characteristics Ⅲ.Trapping Capacitance from 2-Charge-State Impurities

MOS Capacitance-Voltage Characteristics Ⅲ.Trapping Capacitance from 2-Charge-State Impurities
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摘要 Low-frequency and high-frequency capacitance-voltage curves of Metal-Oxide-Semiconductor Capacitors are presented to illustrate giant electron and hole trapping capacitances at many simultaneously present two-charge-state and one-trapped-carrier, or one-energy-level impurity species. Models described include a donor electron trap and an acceptor hole trap, both donors, both acceptors, both shallow energy levels, both deep, one shallow and one deep, and the identical donor and acceptor. Device and material parameters are selected to simu- late chemically and physically realizable capacitors for fundamental trapping parameter characterizations and for electrical and optical signal processing applications. Low-frequency and high-frequency capacitance-voltage curves of Metal-Oxide-Semiconductor Capacitors are presented to illustrate giant electron and hole trapping capacitances at many simultaneously present two-charge-state and one-trapped-carrier, or one-energy-level impurity species. Models described include a donor electron trap and an acceptor hole trap, both donors, both acceptors, both shallow energy levels, both deep, one shallow and one deep, and the identical donor and acceptor. Device and material parameters are selected to simu- late chemically and physically realizable capacitors for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第12期12-27,共16页 半导体学报(英文版)
基金 supported by Xiamen University,China the CTSAH Associates(CTSA) founded by the late Linda Su-Nan Chang Sah
关键词 MOS silicon trapping capacitance dopant impurities donors ACCEPTORS MOS silicon trapping capacitance dopant impurities donors acceptors
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参考文献9

  • 1Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Char- acteristics from Electron-Trapping at Dopant Donor Impurity," Journal of Semiconductors, 32(4), 041001, 1-9, April 2011. This will be referred to as Paper I or Part I of this series of articles on trapping capacitances, published or to be published in this journal.
  • 2Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Char- acteristics II. Sensitivity of Electronic Trappings at Dopant Impurity from Parameter Variations," Journal of Semiconductors, 32(12), 121001, 1-11. December 2011. Preceding article. This will be referred to as Paper II or Part II of this series of articles on trapping capacitances, published or to be published in this journal.
  • 3William Shockley, Electrons and Holes in Semiconductors, 558pp. D. Van Nostrand Company, Inc. New York. 1950. Third edition, reprinted January 1953. See his prophetic Nomogram given in Appendix D on the inside back cover, titled Energy Conversion Chart.
  • 4Chih-Tang Sah, Fundamentals of Solid-State Electronics--Study Guide, 423pp. World Scientific Publishing Company, Singapore. 1993.
  • 5Chih-Tang Sah, Fundamentals of Solid-State Electronics--Solution Manual, 200pp. World Scientific Publishing Company, Singapore. 1996.
  • 6Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics IV. Trapping Capacitance from 3-Charge-State Impurities," Journal of Semiconductors, 33 (1), 011001, January 2012, next issue. This will be referred to as Paper IV or Part IV of this series of articles on trapping capacitances, published or to be published in this journal.
  • 7Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics V. Methods to Enhance the Trapping Capacitance," Journal of Semiconductors, 33(1), 011002, January 2012, next issue. This will be referred to as Paper V or Part V of this series of articles on trapping capacitances, published or to be published in this journal.
  • 8Jie Binbin and Sah Chihtang, "MOS Capacitance-Voltage Characteristics VI. Applications of the Trapping Capacitance," Journal of Semiconductors, 33(2), 021001, February 2012. This will be referred to as Paper VI or Part VI of this series of articles on trapping capacitances, published or to be published in this journal.
  • 9The readers can greatly enlarge the figures, by 200% to 500%, to see the 1016 cm-3 CV curve and the rather small labels on each curve, still in sharp focus, via displaying in the PDF format of the digital copy of this article, online, or downloaded from the Journal of Semiconductor website. [www.jos.ac.cn].

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