摘要
研究了白血病细胞介电电泳芯片,其核心结构由绝缘覆盖层、电极层和绝缘垫层构成。该文对该芯片中的微电极进行了电场力学分析,讨论并设计了芯片的各个参数,应用微机电系统(MEMS)技术成功制备芯片,并对芯片进行了双列直插式DIP封装。文中研究的白血病细胞介电电泳芯片具有微型化,低电压驱动,对细胞无化学毒害等优点。
The leukemia-cell dielectrophresis microchip based on MEMS technology has been studied in this work.The core of the leukemia-cell dielectrophoresis microchip is made up of the insulating cover,electrodes layer and insulating underlay.The micro-electrode of the microchip has been analyzed through the electric field mechanics.The various parameters of the microchip have been discussed and designed.The leukemia-cell dielectrophoresis microchip has been fabricated successfully by using MEMS technology and the chip was packaged by DIP method.The proposed leukemia-cell dielectrophoresis microchip has the good features of miniaturization,low-voltage driving and no chemical poisoning on the cells.
出处
《压电与声光》
CAS
CSCD
北大核心
2011年第6期1002-1005,共4页
Piezoelectrics & Acoustooptics
基金
中华人民共和国工业和信息化部专项[工信部科(2011)353号]基金资助项目
关键词
微机电系统
白血病
介电电泳
芯片
电场
MEMS
leukemia
dielectrophoresis
microchip
electric field
