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化学气相沉积包覆燃料颗粒ZrC涂层的模拟计算

Simulative Calculation of Chemical Vapor Depositing ZrC Coating on Coated Fuel Particles
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摘要 ZrC涂层是高温气冷堆包覆燃料颗粒最具潜力的一种阻挡层材料。本文利用热力学软件HSC-Chemistry 5.0对化学气相沉积ZrC涂层进行模拟计算。结果表明,化学气相沉积ZrC涂层较佳工艺参数范围如下:原料气体中C/Zr比为0.5~1.5,H2/Ar比为0.5~1.5,沉积温度为1 450~1 650℃。 ZrC coating is the most potential retardant layer of high-temperature gas-cooled reactor(HTGR) coated fuel particles.Simulative calculation of chemical vapor depositing(CVD) ZrC coating was studied with HSC-Chemistry 5.0 code.It is found that the proper technological parameter range of ZrC coating is the C/Zr ratio of raw gas 0.5-1.5,the H2/Ar ratio of raw gas 0.5-1.5,and the temperature 1 450-1 650 ℃.
出处 《原子能科学技术》 EI CAS CSCD 北大核心 2011年第11期1289-1293,共5页 Atomic Energy Science and Technology
关键词 包覆燃料颗粒 ZrC涂层 化学气相沉积 模拟计算 coated fuel particles ZrC coating chemical vapor depositing simulative calculation
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