万工显光学接触器的测力对测量精度的影响及其消除

The effect of measuring force of optical contact probe of universal tool maker's microscope on measurement accuracy and its eliminating method

研究了万工显光学接触器在测量过程中其测力对测量精度的影响,建立了该项误差的数学模型,并通过实例对误差进行修正,消除了测力所引起的测量误差,提高了万工显的测量精度。

The effect of measuring force of optical contact probe of universal tool maker's microscope on the measurement accuracy is researched and the mathematical model of this error is established.An example to explain how to correct the error is present,Thereby,the measuring errors caused by measuring force has been eliminated,the accuracy is enhanced.