摘要
介绍了改良西门子法生产多晶硅的优势及进一步改良的方向,指出引导我国多晶硅产业的健康发展需要系列化、标准化和规范化。
The advantage of improved Siemens method for polysilicon production and the direction of the more improvement were introduced.It is pointed out that the healthy development of the polysilicon industry in China is seriation and standardization.
出处
《精细与专用化学品》
CAS
2011年第12期12-14,共3页
Fine and Specialty Chemicals
关键词
多晶硅
改良西门子法
发展
polysilicon
improved Siemens method
development
