摘要
金刚石及相关薄膜材料指的是金刚石薄膜和立方氮化硼薄膜,它们的制备技术被称为“新金刚石技术”。评述了这类材料制备技术研究进展,指出成核及生长机理的研究将是它们走向实用化的关键。
The materials known as diamond and related thin film materials include diamond films and cubic boron nitride thin films,and the method for preparing them are called the new technique of diamond. Progress in research for diamond related materials preparation is renewed in this paper,and it is suggested that the study of the nu-cleation and growth mechanism of these thin films would play an important role in commercial application of these ma-teriall.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2000年第1期44-45,46,共3页
Materials Reports
