氯硅烷储罐上增设冷凝器漏水监测装置改造

Revamp on chlorosilane tank by adding condenser leakage monitoring device

介绍了改良西门子法生产多晶硅过程中起缓冲作用的大型氯硅烷储罐存在的安全隐患,提出了在氯硅烷储罐上增设冷凝器漏水监测装置的方案,给出了该装置的结构与工艺流程,阐述了其工作原理。在近半年的生产运行当中,漏水监测装置起到了很好的监控作用。

Hidden hazards in large chlorosilane storage tanks during production of polysilicon by modified Siemens process,is introduced. The proposal adding a condenser leakage monitoring device to the chlorosiane tank is put forward. The process and working principle of the device are described as well. Moreover,in the past half year＇ s production run, this new condenser leakage monitoring device has effectively solved the safety problems in the large chlorosilane storage tanks.