声表面波化学传感器膜材料的研究进展

Research Progress on Coating Material of Surface Acoustic Wave(SAW) Chemical Sensor

声表面波(Surface Acoustic Wave,简称SAW)化学传感器是一种可用于现场实时检测的气敏传感器,具有体积小、选择性好、信号响应快等特点,其中敏感膜材料是决定其性能的关键因素。本文主要介绍了传感器的工作原理,敏感膜与吸附气体之间的作用力,对膜材料的选择及性能影响因素进行了详细阐述。重点介绍了现有膜材料的分类及应用,主要有有机聚合物膜、无机物膜、超分子膜和复合膜,比较了它们的优缺点。对现有成果进行总结,同时提出了传感器膜材料的发展趋势。

Surface acoustic wave （SAW） chemical sensor is a kind of vapor sensor with the characteristics of small size, good selectivity, fast response and so on, which can operate in situ and in real-time. Coating material plays a critical role in deciding the performance of sensor. In this paper, working principle and the force between sensitive membrane and gas were introduced. Then the choosing of coating material and influence factors were elaborated. Especially the classification and application of coating material were illustrated, that is organic polymer film, inorganic suhstance film, supermolecule film and complex film. At the same time, a comparation was also made. Lastly, the existing achievements were summarized and a brief discussion on the trend of research was given.