Ⅲ-Ⅴ族半导体NEA光电阴极智能激活测试系统设计及应用研究

Design and Application of Ⅲ-Ⅴ Semiconductor NEA Photocathode Intelligent Auto-activation and Test System

Ⅲ-Ⅴ族半导体负电子亲和势(NEA)光电阴极智能激活测试系统是为研究、制备NEA光电阴极材料提供的一个多信息实验数据自动采集和处理平台。它的亮点在于:在该系统上不但能完成GaAsNEA光电阴极激活,而且能进行GaN NEA光电阴极激活的研究。其使用波长范围已从初级研究的400～1000 nm延展到了200～1000 nm,即从红外延伸到紫外区域,所能制备的材料也从第二代半导体材料扩大到了第三代半导体及新型半导体材料。在线实时测试信息量更丰富、更智能、自动化程度更高,是Ⅲ-Ⅴ族半导体NEA光电阴极制备、测控、数据采集与处理、表征的新一代系统。

The intelligent auto-activation and test system for Ⅲ-Ⅴ group negative electron affinity （NEA） photocathodes designed to research and prepare NEA photocathode materials is a multi-information system for automatically collecting and processing experimental data. This system can activate both GaAs NEA photocathode and GaN NEA photocathode. The system helps to extend the wavelength response from the initial 400-1000 nrn to 200-1000 nm, which means the wavelength extends from infrared to ultraviolet. The preparation materials are extended from the second generation semiconductor material to the third generation and new semiconductor material. The system is more intelligent and higher automated, the information obtianed from on-line test is richer, which makes it a new system for manufacturing, controlling, data collecting and disposing, and evaluating Ⅲ-Ⅴ group NEA photocathodes.