图案化锥形氧化锌纳米带的原位热氧化法制备与发光性质

In-situ Growth and Photoluminescence of the Patterned Conelike ZnO Nanobelts through Thermal Oxidation

采用光刻技术制备出图案的锌膜,所得锌膜与纯氧在700℃氧化反应10 min,在锌膜的表面上原位生长出具有图案的锥形ZnO纳米带阵列,实现了ZnO纳米带生长位置的可控生长。锌膜上得到的锥形ZnO纳米带为单晶六方纤锌矿结构,长度在1～4μm,纳米带根部和顶部的宽度分别在300～700 nm和100～300 nm。提出了锥形ZnO纳米带的可能生长机理。在波长为300nm光的激发下,发现了锌膜上锥形ZnO纳米带具有发光峰位于395 nm弱的紫外光发光和510 nm强的蓝绿光发光,它们分别起源于ZnO宽带隙的激子发射以及表面上离子化氧空位中的电子与价带中光激发的空穴之间的复合。

The patterned zinc film was fabricated by the photolithography. The patterned conelike ZnO nanobelts arrays have been in-situ growing on the surface of the patterned zinc film at 700 ℃ in 02 atmosphere for 10 min. The control over the growth position of the nanobelts was achieved. The conelike ZnO nanobelts growing on the zinc film were single crystalline with the wurtzite structure, and have lengths of 1-4 μm. The width of theconelike nanobehs on the bottom and the tip are 300-700 nm and 100-300 nm, respectively. A possible mechanism was also proposed to account for the formation of the conelike ZnO nanobelts. A weak UV emission at 395 nm and an intense green-blue emission peak at 510 nm were observed from the conelike ZnO nanobelts growing on the zinc film. The 395 and 510 nm emissions are assigned to the free excition emission from the band gap of ZnO, and recombination of electrons in ionized oxygen vacancies on the surface with photoexcited holes in the valence band, respectively.