集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作

Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance

由于SU-8胶的弹性模量比硅的低,在SU-8胶悬臂梁上集成金属压阻可获得很高的力灵敏度系数,因此本文基于SU-8胶设计并制作了一种集成蛇形结构铜金属压阻层的SU-8胶悬臂梁微力传感器。介绍了制作微力传感器的新型工艺,并进行了传感器性能测试。实验结果表明:设计的SU-8胶微力传感器在0～350μN具有较好的线性度,力灵敏度为0.24mV/μN,测量误差为4.06%。该微力传感器可以满足对微小力的测量,相对于硅材料的微力传感器,其制作工艺更加简单,周期更短。由于SU-8胶的生物兼容性好,该传感器在生物医学研究领域有着很好的应用前景。

As the SU-8 cantilever integrated by a metal piezoresistance can achieve a very high force sensitive coefficient due to its low elastic modulus,this paper designs a new type of SU-8 cantilever micro-force sensor integrated by a serpent-shaped copper piezoresistive structure and fabricates a prototype with a double-layer cantilever by a novel processing method.It introduces the design principles and fabrication method for the micro-force sensors and measures its technological parameters. Experimental results show that the SU-8 micro-force sensor has good linearity range in 0-350 μN and its force sensitivity is 0.24 mV/μN and measuring error is 4.06%.It can implement the micro-force detection and has advantages of simpler production process and shorter cycle as compared with a silicon micro-force sensor. Moreover,the force sensor has potential application in biomedical research for the SU-8 with prominent biological compatibility.