基于显微图像处理的MEMS运动测量方法

Motion Measurement Method of MEMS Based on Micro-Image Processing

为实现对MEMS的高精度运动测量,采用了基于显微图像处理的运动测量方法.在该方法中,针对特定的MEMS器件,首先将其放置在显微镜下摄取其可动部位的运动录像,由运动录像获取显微图像序列;然后针对MEMS自身结构的特点,设计有效的显微图像处理方法提取其运动位移,由位移最终获取MEMS器件的运动轨迹.基于上述方法,以微加速度计为例,根据其结构和运动特点,提出一种具有亚像素级精度的像素平移法提取其运动位移,将稳态位移的检测结果与理论值对比,得到检测结果为理论值的90.21%.检测结果与理论值良好的一致性,初步验证了方法的有效性.

To achieve high precision of MEMS motion measurement, a motion measurement method based on microscopic image processing was adopted. In this method, for a certain MEMS device, the sports vid- eo of its mobile parts was first recorded by using a microscope, and a micro-image sequence could be captured from this video. Then, according to the features of its design structure, a micro-image process- ing method was designed to extract its displacement, by which its motion curve could be finally obtained. Based on the method above, the micro-accelerometer was taken as an example, and according to its struc- ture and the features of its motion, a pixel translational algorithm was proposed to extract its displace- ment. The comparison shows that the experimental result is 90. 21% of theoretical data. The good consis- tency between the experimental and theoretical results basically verifies the effectiveness of this method.